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US 12,504,332 B2Granted
Substrate temperature sensor, substrate retainer and substrate processing apparatus
AssigneeKokusai Electric Corporation
InventorsTokunobu Akao, Hitoshi Murata, Akinori Tanaka, Masaaki Ueno
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Abstract
According to one aspect of the technique, there is provided a substrate temperature sensor configured to measure a temperature of a substrate, wherein the substrate temperature sensor is provided in a protective pipe provided to be accommodated in a recess formed at a portion of a substrate retainer on which the substrate is mounted.
Claims20
A substrate temperature sensor configured to measure a temperature of a substrate,
- wherein the substrate temperature sensor is provided in a protective pipe provided to be accommodated in a recess formed at a portion of a substrate retainer on which the substrate is mounted.
A substrate processing apparatus comprising:
- a substrate temperature sensor provided in a protective pipe provided to be accommodated in a recess formed at a portion of a substrate retainer on which a substrate is mounted and configured to measure a temperature of the substrate;
- and
- a process chamber to which the substrate retainer is transferred with the substrate accommodated therein.
Dependencies are inferred from the claim text.