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US 12,504,328 B2Granted
Infrared detector forming method and associated infrared detector
AssigneesMsg Lithoglas AG, Lynred
InventorsDavid Bunel, Ulli Hansen, Simon Maus
Life of this patent
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Abstract
A method of forming an infrared detector includes defining an optical window in a cover substrate. Defining the optical window includes forming a multilayer interference filter or a periodic diffraction grating on an upper surface of the optical window and a periodic diffraction grating on the lower surface of the optical window. The method also includes performing anodic bonding of a spacer onto the cover substrate, transferring the cover substrate provided onto a base substrate, and hermetically bonding the spacer onto the base substrate.
Claims12
A method of forming an infrared detector comprising the steps of:
- definition of an optical window in a first substrate, called cover substrate;
- anodic bonding of a spacer onto a lower surface of said cover substrate at the periphery of said optical window to form the lateral walls of a package;
- transfer of said cover substrate provided with said spacer onto a second substrate, called base substrate, having at least one microbolometer suspended thereon;
- and
- hermetic bonding of said spacer onto said base substrate to form a hermetic package around said at least one microbolometer;
- wherein the step of definition of the optical window comprises forming a multilayer interference filter or a periodic diffraction grating on an upper surface of said optical window, and a periodic diffraction grating on the lower surface of said optical window;
- the multilayer interference filter or the periodic diffraction grating of the upper surface being configured to attenuate the incident radiation in a first wavelength interval in the range from 2 to x micrometers;
- the periodic diffraction grating of the lower surface being configured to attenuate the incident radiation in a second wavelength interval in the range from y to 8 micrometers;
- with x in the range from 2 to 8 micrometers and y smaller than or equal to x.
6 more elements
An infrared detector comprising:
- a base substrate having at least one microbolometer suspended thereon;
- walls formed by a spacer made of glass, bonded onto said base substrate;
- and a cover substrate bonded onto said spacer by anodic bonding;
- said cover substrate having an optical window comprising:
- a multilayer interference filter or a periodic diffraction grating on an upper surface of said optical window;
- and a periodic diffraction grating arranged on a lower surface of said optical window;
- said multilayer interference filter or the periodic diffraction grating of the upper surface being configured to attenuate the incident radiation in a first wavelength interval in the range from 2 to x micrometers;
- said periodic diffraction grating of the lower surface being configured to attenuate the incident radiation in a second wavelength interval in the range from y to 8 micrometers;
- with x in the range from 2 to 8 micrometers and y smaller than or equal to x.
6 more elements
An infrared detector comprising:
- a base substrate having at least one microbolometer suspended thereon;
- walls formed by a spacer made of silicon, bonded onto said base substrate;
- an insert made of glass bonded onto said spacer;
- and
- a cover substrate bonded onto said insert by anodic bonding;
- said cover substrate having an optical window comprising:
- a multilayer interference filter or a periodic diffraction grating arranged on an upper surface of said optical window;
- and
- a periodic diffraction grating arranged on a lower surface of said optical window;
- said multilayer interference filter or the periodic diffraction grating of the upper surface being configured to attenuate the incident radiation in a first wavelength interval in the range from 2 to x micrometers;
- said periodic diffraction grating of the lower surface being configured to attenuate the incident radiation in a second wavelength interval in the range from y to 8 micrometers;
- with x in the range from 2 to 8 micrometers and y smaller than or equal to x.
9 more elements
Dependencies are inferred from the claim text.