Substrate processing apparatus and substrate processing method

A substrate processing apparatus comprising:

• a processing chamber configured to process a substrate;
• a gas source configured to supply a gas containing aluminum trichloride and carbon to the processing chamber;
• a first filtration part provided in a supply path configured to supply the gas from the gas source to the processing chamber, and containing a first porous coordination polymer that selectively adsorbs carbon contained in the gas supplied to the processing chamber;
• and
• a second filtration part provided in an exhaust path configured to exhaust a gas from the processing chamber, and containing a second porous coordination polymer that selectively adsorbs aluminum trichloride contained in the gas exhausted from the processing chamber,
• wherein the first porous coordination polymer is a porous coordination polymer that contains a metal complex composed of a coordination bond between a zinc cluster ion (Zn4O) and 4,4′,4″-(benzene-1,3,5-triyl-tris (benzene-4,1-diyl)) tribenzoate, and has a pore structure formed by accumulating a plurality of metal complexes, and
• wherein the second porous coordination polymer is selected from the group consisting of:
• a porous coordination polymer that contains a metal complex composed of a coordination bond between a copper ion and 1,3,5-benzenetricarboxylic acid and has a pore structure formed by accumulating a plurality of metal complexes;
• a porous coordination polymer that contains a metal complex composed of a coordination bond between an iron ion and 1,3,5-benzenetricarboxylic acid and has a pore structure formed by accumulating a plurality of metal complexes;
• a porous coordination polymer that contains a metal complex composed of a coordination bond between a chromium ion and terephthalic acid and has a pore structure formed by accumulating a plurality of metal complexes;
• and
• a porous coordination polymer that contains a metal complex composed of a coordinate bond between a lanthanum ion and 1,3,5-tris (4-carboxyphenyl) benzene and has a pore structure formed by accumulating a plurality of metal complexes.