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US 12,503,433 B2Granted
Acetal-based compound, acetal-based prepolymer, acetal-based polymer, and photoresist composition comprising the same
AssigneesSamsung Electronics Co., Ltd., Inha-Industry Partnership Institute
InventorsChanjae Ahn, Myungwoong Kim, Yoonhyun Kwak, Sol An
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Abstract
An acetal-based compound represented by Formula 1, an acetal-based prepolymer, an acetal-based polymer, and a photoresist composition including the same wherein in Formula 1, R1 to R10, G, a, and b are as defined in the detailed description, and * indicates a linking site.
Claims22
An acetal-based prepolymer which is a polymerization product of the acetal-based compound, a first polymerizable monomer having a polar group, and a second polymerizable monomer having an acid labile group,
- wherein the acetal-based compound is represented by Formula 1:
- wherein, in Formula 1,
- R1 to R10 are each independently hydrogen, deuterium, a substituted or unsubstituted C1-C60 alkyl group, a substituted or unsubstituted C2-C60 alkenyl group, a substituted or unsubstituted C2-C60 alkynyl group, a substituted or unsubstituted C1-C60 alkoxy group, a substituted or unsubstituted C3-C10 cycloalkyl group, a substituted or unsubstituted C1-C10 heterocycloalkyl group, a substituted or unsubstituted C3-C10 cycloalkenyl group, a substituted or unsubstituted C1-C10 heterocycloalkenyl group, a substituted or unsubstituted C6-C60 aryl group, a substituted or unsubstituted C6-C60 aryloxy group, a substituted or unsubstituted C6-C60 arylthio group, a substituted or unsubstituted C1-C60 heteroaryl group, a substituted or unsubstituted C8-C60 monovalent non-aromatic condensed polycyclic group, a substituted or unsubstituted C1-C60 monovalent non-aromatic condensed heteropolycyclic group, —Si(Q1)(Q2)(Q3), —B(Q1)(Q2), —N(Q1)(Q2), —P(Q1)(Q2), —C(═O)(Q1), —S(═O)(Q1), —S(═O)2(Q1), —P(═O)(Q1)(Q2), or —P(═S)(Q1)(Q2),
- Q1 to Q3 are each independently hydrogen;
- deuterium;
- —F;
- —Cl;
- —Br;
- —I;
- a hydroxyl group;
- a cyano group;
- a nitro group;
- a C1-C60 alkyl group;
- a C2-C60 alkenyl group;
- a C2-C60 alkynyl group;
- a C1-C60 alkoxy group;
- or a C3-C60 carbocyclic group unsubstituted or substituted with deuterium, —F, cyano group, a C1-C60 alkyl group, a C1-C60 alkoxy group, a phenyl group, a biphenyl group, or any combination thereof;
- a C1-C60 heterocyclic group unsubstituted or substituted with deuterium, —F, cyano group, a C1-C60 alkyl group, a C1-C60 alkoxy group, a phenyl group, a biphenyl group, or any combination thereof;
- a C7-C60 arylalkyl group unsubstituted or substituted with deuterium, —F, cyano group, a C1-C60 alkyl group, a C1-C60 alkoxy group, a phenyl group, a biphenyl group, or any combination thereof;
- or a C2-C60 heteroarylalkyl group unsubstituted or substituted with deuterium, —F, cyano group, a C1-C60 alkyl group, a C1-C60 alkoxy group, a phenyl group, a biphenyl group, or any combination thereof,
- with an exception that both R1 and R2 are hydrogen (in other words, neither R1 nor R2 are both hydrogen),
- a and b are each independently 0 or an integer of 1 to 10,
- G is a group represented by Formula 2 or Formula 2a,
- wherein, in Formula 2 and Formula 2a, R4 is an unsubstituted or substituted C1-C60 alkyl group or an unsubstituted or substituted C1-C60 aryl group,
- R3 and R5 to R8 are each independently hydrogen, or an unsubstituted or substituted C1-C20 alkyl group,
- * indicates a linking site, and
- k is 0 or 1.
24 more elements
Dependencies are inferred from the claim text.