Method and apparatus for producing silicon-containing materials
AssigneeSchmid Silicon Technology GmbH
InventorsPeter Feinäugle, Jochem Hahn, Georgij Petrik, Christian Schmid
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Abstract
A process of producing silicon-containing materials includes converting a gas to a superheated state in which it is at least partly in plasma form, and contacting the superheated gas with a silicon-containing first starting material to form a mixture including the gas and silicon, wherein the silicon-containing materials are produced by adding to the gas or the mixture a second starting material that can enter into a chemical reaction directly with the silicon in the mixture, or breaks down thermally on contact with the superheated gas and/or the mixture, and steps a. and b. are effected spatially separately from one another.
Claims6
A process of producing silicon-containing materials comprising:
- converting a gas to a superheated state in which it is at least partly in plasma form, contacting the superheated gas in a first chamber of a reactor with a silicon-containing first starting material to form a mixture comprising the gas and silicon at a contacting temperature above the breakdown temperature of the silicon-containing material;
- passing one of the silicon or the mixture to a second chamber of the reactor via a tapered passage;
- adding to the silicon or the mixture in the second chamber a second starting material that can enter into a chemical reaction directly with the silicon in the mixture, or breaks down thermally on contact with the superheated gas and/or the mixture.
Dependencies are inferred from the claim text.