Device for correcting robotic arm

A device for correcting a robotic arm, comprising:

• a first robotic arm positioned in a vacuum transmission chamber;
• a first jig wafer comprising a first wafer body and a first jig, wherein the first jig is positioned on a front surface of the first wafer body;
• a first distance measuring sensor positioned at a center position of a back surface of the first wafer body, wherein the first distance measuring sensor is configured to detect whether a center of the first jig wafer is aligned with a center of a wafer chuck;
• a second distance measuring sensor positioned on the front surface of the first wafer body and on an outside of the first jig, wherein the second distance measuring sensor is configured to detect a lifting height of the first robotic arm when the first robotic arm controls a pick-and-place operation the first jig wafer on an upper surface of the wafer chuck;
• a first control device connected to the first distance measuring sensor and the second distance measuring sensor, wherein the first control device is configured to output a control signal when the center of the first jig wafer is deviated from the center of the wafer chuck;
• and
• a driving device connected to the first control device, wherein the driving device is configured to control the first jig to drive the first wafer body to move after the control signal is received;
• wherein the wafer chuck comprises an electrostatic chuck or a vacuum chuck.