US 12,502,745 B2 · Processing machine and production method for object subject to processing

Abstract

In a processing machine, a machine body drives at least one of a workpiece and a tool to process the workpiece by the tool. A processing chamber isolates the workpiece, the tool, and a nozzle from at least part of the machine body while housing the workpiece, the tool, and the nozzle. An internal temperature sensor measures a temperature of an atmosphere in the processing chamber. An external temperature sensor measures a temperature of an atmosphere around the processing machine. A temperature adjustment part raises a temperature of the processing fluid to be supplied to the nozzle when a measured temperature of the internal temperature sensor is lower than a measured temperature of the external temperature sensor, and/or the temperature adjustment part lowers the temperature of the processing fluid to be supplied to the nozzle when the measured temperature of the internal temperature sensor is higher than the measured temperature of the external temperature sensor.

Claims6

Dependent claims

A processing machine in which a nozzle supplying a processing fluid to a region where a workpiece is processed by a tool is arranged, comprising:

a machine body configured to drive at least one of the workpiece and the tool to process the workpiece by the tool,
a processing chamber which isolates the workpiece, the tool, and the nozzle from at least part of the machine body while housing the workpiece, the tool, and the nozzle,
an internal temperature sensor configured to measure a temperature of an atmosphere in the processing chamber,
an external temperature sensor configured to measure a temperature of an atmosphere around the processing machine, and
a temperature adjustment part which performs at least one of:
an operation of raising a temperature of the processing fluid to be supplied to the nozzle in response to a measured temperature obtained by the internal temperature sensor being lower than a measured temperature obtained by the external temperature sensor, and
an operation of lowering the temperature of the processing fluid to be supplied to the nozzle in response to the measured temperature obtained by the internal temperature sensor being higher than the measured temperature obtained by the external temperature sensor.

4 more elements

A method of manufacturing a processed object comprising:

processing a workpiece to the processed object by a tool by using a processing machine comprising:
a machine body which drives at least one of the workpiece and the tool, and
a processing chamber which isolates the workpiece, the tool, and the nozzle from at least part of the machine body while housing the workpiece, the tool, and the nozzle;
supplying the processing fluid from the nozzle to a region where the workpiece is processed by the tool in parallel with the processing;
measuring a temperature of an atmosphere in the processing chamber;
measuring a temperature of an atmosphere around the processing machine;
and
performing at least one of:
an operation of raising a temperature of the processing fluid to be supplied to the nozzle in response to a measured temperature of the atmosphere in the processing chamber being lower than a measured temperature of the atmosphere around the processing machine, and
an operation of lowering the temperature of the processing fluid to be supplied to the nozzle in response to the measured temperature of the atmosphere in the processing chamber being higher than the measured temperature of the atmosphere around the processing machine.

7 more elements

Dependencies are inferred from the claim text.

Processing machine and production method for object subject to processing

Life of this patent

Processing machine and production method for object subject to processing

Life of this patent

Abstract

Claims6