Methods for cleaning the pull cable of an ingot puller apparatus
AssigneeGlobalWafers Co., Ltd.
InventorsChin-Hung Ho, Chih-Kai Cheng, Chen-Yi Lin, Feng-Chien Tsai, Tung-Hsiao Li, YoungGil Jeong, Jin Yong Uhm
Life of this patent
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Abstract
Cleaning tools for cleaning the pull cable of an ingot puller apparatus and methods for cleaning the pull cable are disclosed. The cleaning tool includes a chamber for receiving the pull cable. Pressurized fluid is discharged through one or more nozzles to detach debris from the pull cable. The fluid and debris are collected in an exhaust plenum of the cleaning tool and are expelled through an exhaust tube. The cleaning tool includes one or more guides that guide the cleaning tool in an upper segment of the ingot puller apparatus.
Claims20
A method for cleaning a pull cable of an ingot puller apparatus, the ingot puller apparatus comprising a crystal puller housing that defines a growth chamber for pulling a silicon ingot from a silicon melt, the crystal puller housing comprising a lower dome-shaped segment and an upper cylindrical-shaped segment that is removably connected to the lower dome-shaped segment, the method comprising:
- positioning the pull cable within a chamber of a cleaning tool;
- directing pressurized fluid toward the pull cable;
- removing the pressurized fluid that is directed toward the pull cable through an exhaust plenum of the cleaning tool for processing the pressurized fluid;
- and
- extending and retracting an extendable handle to raise and lower the cleaning tool into the upper cylindrical-shaped segment of the ingot puller apparatus, the extendable handle comprising a telescoping portion that enables the extendable handle to be extended and retracted.
A method for cleaning a pull cable of an ingot puller apparatus, the ingot puller apparatus comprising a crystal puller housing that defines a growth chamber for pulling a silicon ingot from a silicon melt, the crystal puller housing comprising a lower dome-shaped segment and an upper cylindrical-shaped segment that is removably connected to the lower dome-shaped segment, the method comprising:
- positioning the pull cable within a chamber of a cleaning tool, the cleaning tool comprising:
- a frame comprising a main body, the chamber extending through the main body;
- one or more nozzles;
- an exhaust flue in which fluid discharged from the one or more nozzles is carried away, the exhaust flue comprising an exhaust plenum within the main body;
- and
- one or more outer guides that guide the cleaning tool within the upper cylindrical-shaped segment of the ingot puller apparatus during cleaning of the pull cable, the one or more outer guides being disposed radially outward from the main body, each of the one or more outer guides comprising a roller that contacts an inner surface of the upper cylindrical-shaped segment of the ingot puller apparatus;
- directing pressurized fluid through the one or more nozzles and toward the pull cable;
- and
- removing the pressurized fluid that is directed toward the pull cable through the exhaust plenum of the cleaning tool for processing the pressurized fluid.
Dependencies are inferred from the claim text.