Backflush seal cleaning apparatus
AssigneeApplied Materials, Inc.
InventorsBenjamin Clay Bradley, Ryan Michael Thompson
Life of this patent
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Abstract
Exemplary seal cleaning apparatuses may include at least one support that is configured to receive a seal. The apparatuses may include a tool arm that is positionable within an interior of the seal. The apparatuses may include a pad holder that is rotatably coupled with the tool arm. The pad holder may include a body having a first end and a second end. The first end may define a channel that is configured to receive a cleaning pad. The body may define an aperture that extends from the second end through the channel. The pad holder may include a fluid fitting coupled with the aperture at the second end of the body. The apparatuses may include a cleaning fluid source that is fluidly coupled with the fluid fitting.
Claims10
A pad holder, comprising:
- a body comprising a first end and a second end, wherein:
- the first end defines a channel that is configured to receive a cleaning pad;
- the body defines a fluid lumen having an inlet and an outlet;
- and
- the outlet extends through the channel;
- and
- a fluid fitting coupled with the inlet of the fluid lumen.
Dependencies are inferred from the claim text.