Shear horizontal mode acoustic wave device with multilayer interdigital transducer electrode

A shear horizontal acoustic wave device comprising:

• a piezoelectric layer having a cut angle in a range of −20° YX to 25° YX;
• an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode including a first layer having a first density and a second layer having a second density, the first density being greater than the second density, the second layer positioned between the piezoelectric layer and the first layer such that a frequency response of the acoustic wave device includes a Rayleigh mode response at a frequency higher than a shear horizontal mode response;
• and
• a temperature compensation layer over the interdigital transducer electrode.

An acoustic wave device comprising:

• a lithium niobate piezoelectric layer having a cut angle in a range of −20° YX to 25° YX such that a shear horizontal mode is a main mode of the acoustic wave device;
• an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode including a tungsten layer and an aluminum layer, the aluminum layer positioned between the lithium niobate piezoelectric layer and the tungsten layer such that a frequency response of the acoustic wave device includes a Rayleigh mode response at a frequency higher than a shear horizontal mode response;
• and
• a temperature compensation layer over the interdigital transducer electrode.