Surface emitting laser, surface emitting laser array, electronic device, and method for manufacturing surface emitting laser

A method for manufacturing a surface emitting laser, the method comprising:

• generating a laminate by laminating at least a first multilayer film reflector, an active layer, and a second multilayer film reflector in this order;
• forming an insulating film on a side opposite to a side of the active layer with respect to the second multilayer film reflector of the laminate;
• etching the insulating film to form an opening;
• and
• diffusing impurities into a part of a layer including a first surface layer farther from the active layer of the second multilayer film reflector via the opening, wherein
• the second multilayer film reflector includes a first layer and a second layer provided with a high-concentration impurity region having a higher impurity concentration than other regions,
• the first layer has one or more pairs of refractive index layers,
• at least one of the one or more pairs of refractive index layers of the first layer contains Al in a composition,
• the second layer has one or more pairs of refractive index layers,
• at least one of the one or more pairs of refractive index layers of the second layer contains Al in a composition, and
• a ratio of an optical thickness of a refractive index layer having a higher Al composition to an optical thickness of a refractive index layer having a lower Al composition in the one or more pairs of refractive index layers of the second layer is larger than a ratio of an optical thickness of a refractive index layer having a higher Al composition to an optical thickness of a refractive index layer having a lower Al composition in the one or more pairs of refractive index layers of the first layer.