Wafer placement table
AssigneeNGK Insulators, Ltd.
InventorsTatsuya Kuno, Seiya Inoue, Hiroshi Takebayashi, Masaki Ishikawa
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Abstract
A wafer placement table is a wafer placement table that includes a refrigerant flow channel through which refrigerant is flowed and includes a top base including a ceramic base incorporating an electrode and having a wafer placement surface on a top surface of the ceramic base, a bottom base on a top surface of which a flow channel groove defining a side wall and a bottom of the refrigerant flow channel is provided, and a seal member disposed between the top base and the bottom base so as to seal the refrigerant flow channel from an outside.
Claims14
A wafer placement table that includes a refrigerant flow channel through which refrigerant is flowed, the wafer placement table comprising:
- a top base that includes a ceramic base incorporating an electrode and having a wafer placement surface on a top surface of the ceramic base;
- a bottom base on a top surface of which a flow channel groove that defines a side wall and a bottom of the refrigerant flow channel is provided;
- and
- a seal member disposed between the top base and the bottom base so as to seal the refrigerant flow channel from an outside;
- wherein a bottom surface of the top base defines a ceiling of the refrigerant flow channel;
- and
- wherein the top base and the bottom base are not bonded at an interface between the ceiling of the refrigerant flow channel of the top base and the side wall and the bottom of the refrigerant flow channel of the bottom base.
Dependencies are inferred from the claim text.