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US 12,498,637 B2Granted
Positive resist composition and pattern forming process
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsJun Hatakeyama, Masahiro Fukushima
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Abstract
A positive resist composition is provided comprising a base polymer comprising repeat units (a) having two triple bonds and repeat units (b) adapted to increase solubility in an alkaline developer under the action of acid. A pattern of good profile with a high resolution, reduced LWR, and improved CDU is formed therefrom.
Claims11
A positive resist composition comprising a base polymer comprising a repeat unit (a) having two triple bonds and a repeat unit (b) adapted to increase its solubility in an alkaline developer under the action of acid;
- wherein the repeat unit (a) has the formula (a):
- wherein RA is hydrogen or methyl,
- X1 is an ester bond or phenylene group,
- X2 is a single bond, a phenylene group, or a C1-C10 aliphatic hydrocarbylene group in which any constituent —CH2— may be replaced by an ether bond, ester bond or sulfonic ester bond,
- X3 is a single bond, ether bond, ester bond, carbonate bond or urethane bond,
- R1 and R2 are each independently hydrogen, C1-C4 alkyl group or phenyl group.
3 more elements
Dependencies are inferred from the claim text.