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US 12,498,597 B2Granted
Substrate treating apparatus and method thereof
AssigneeSemes Co., Ltd.
InventorsHong Joo Lee, Moo Hyung Yi
Life of this patent
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Abstract
The present disclosure provides substrate processing apparatus and a substrate processing method for composing nozzles having different drop sizes into one or more pack units and performing pixel printing by using nozzles belonging to the thus composed packs. The substrate processing method includes extracting nozzles that have different drop sizes as different sized dropping nozzles, composing extracted nozzles into one or more packs, and performing pixel printing on the substrate with nozzles included in the pack by discharging a substrate treatment solution to a common target location on the substrate.
Claims13
A method of treating a substrate, the method comprising:
- selecting nozzles for discharging substrate treatment solution to one pixel among different sized dropping nozzles having different drop sizes;
- and
- performing pixel printing on the substrate with the nozzles selected among the different sized dropping nozzles by discharging the substrate treatment solution to a common target location for the one pixel on the substrate,
- wherein the selecting of the nozzles comprises:
- determining whether the nozzles for discharging the substrate treatment solution to the one pixel are able or unable to be selected such that a total volume of the substrate treatment solution discharged to the one pixel from the nozzles selected among the different sized dropping nozzles is identical to a volume required for the one pixel,
- if the nozzles for discharging the substrate treatment solution to the one pixel are able to be selected such that the total volume of the substrate treatment solution discharged to the one pixel from the nozzles selected among the different sized dropping nozzles is identical to the volume required for the one pixel, selecting the nozzles for discharging the substrate treatment solution to the one pixel among the different sized dropping nozzles such that the total volume of the substrate treatment solution discharged to the one pixel from the nozzles selected among the different sized dropping nozzles is identical to the volume required for the one pixel, and
- if the nozzles for discharging the substrate treatment solution to the one pixel are unable to be selected such that the total volume of the substrate treatment solution discharged to the one pixel from the nozzles selected among the different sized dropping nozzles is identical to the volume required for the one pixel, selecting the nozzles for discharging the substrate treatment solution to the one pixel among the different sized dropping nozzles such that the total volume of the substrate treatment solution discharged to the one pixel from the nozzles selected among the different sized dropping nozzles is greater than the volume required for the one pixel and has a lowest difference between the volume required for the one pixel and the total volume of the substrate treatment solution discharged to the one pixel from the nozzles selected among the different sized dropping nozzles.
4 more elements
A method of treating a substrate, the method comprising:
- obtaining information on grooves formed on the substrate;
- determining a pixel volume required for one pixel formed in each of the grooves based on the information on the grooves;
- selecting nozzles for discharging a substrate treatment solution to the one pixel among different sized dropping nozzles having different drop sizes based on the volume required for the one pixel;
- and
- performing pixel printing on the substrate with the nozzles selected among the different sized dropping nozzles by discharging the substrate treatment solution to a common target location for the one pixel on the substrate,
- wherein the selecting of the nozzles comprises:
- analyzing drop sizes of the nozzles included in an inkjet head,
- determining whether the nozzles for discharging the substrate treatment solution to the one pixel are able or unable to be selected such that a total volume of the substrate treatment solution discharged to the one pixel from the nozzles selected among the different sized dropping nozzles is identical to the volume required for the one pixel,
- if the nozzles for discharging the substrate treatment solution to the one pixel are able to be selected such that the total volume of the substrate treatment solution discharged to the one pixel from the nozzles selected among the different sized dropping nozzles is identical to the volume required for the one pixel, selecting the nozzles for discharging the substrate treatment solution to the one pixel among the different sized dropping nozzles such that the total volume of the substrate treatment solution discharged to the one pixel from the nozzles selected among the different sized dropping nozzles is identical to the volume required for the one pixel, and
- if the nozzles for discharging substrate treatment solution to the one pixel are unable to be selected such that the total volume of the substrate treatment solution discharged to the one pixel from the nozzles selected among the different sized dropping nozzles is identical to the volume required for the one pixel, selecting the nozzles for discharging substrate treatment solution to the one pixel among the different sized dropping nozzles such that the total volume of the substrate treatment solution discharged to the one pixel from the nozzles selected among the different sized dropping nozzles is greater than the volume required for the one pixel and has a lowest difference between the volume required for the one pixel and the total volume of the substrate treatment solution discharged to the one pixel from the nozzles selected among the different sized dropping nozzles.
7 more elements
Dependencies are inferred from the claim text.