Contrast-enhancing staining system and method and imaging methods and systems related thereto
AssigneeTechinsights Inc.
InventorsChristopher Pawlowicz, Spyridon Ntais
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AssigneeTechinsights Inc.
InventorsChristopher Pawlowicz, Spyridon Ntais
Estimating the term…
Described are various embodiments of a contrast-enhancing staining system and method. In one embodiment, a method is described for enhancing contrast in an image of a substrate surface between regions of said substrate having different charge carrier characteristics. The method comprises exposing said substrate to a staining precursor comprising an oxidant; directing microwave electromagnetic radiation at the substrate, said microwave electromagnetic radiation enhancing a reaction rate of said oxidant reacting into a deposition material, said reaction rate being related to the charge carrier characteristics of a proximal region; and acquiring an image of said substrate surface indicating a visual contrast between each of said regions based on differential deposition of the deposition material therebetween.
A method for enhancing contrast in an image of a substrate surface between regions of said substrate having different charge carrier characteristics, the method comprising:
An image acquisition system for acquiring an image of an semiconductor substrate showing enhanced contrast between two or more regions of said substrate having different charge carrier characteristics, the system comprising:
Dependencies are inferred from the claim text.