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US 12,498,293 B2Granted
Multi-configurable wavefront tester
AssigneeMLOptic Corp.
InventorsPengfei Wu, Wei Zhou, Wei Wang, Yongshui Cai
Life of this patent
Estimating the term…
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AssigneeMLOptic Corp.
InventorsPengfei Wu, Wei Zhou, Wei Wang, Yongshui Cai
Estimating the term…
A wavefront tester for measuring the wavefront of a sample via an optical path, the wavefront tester including a mirror, an imaging lens, an aperture, a beam splitter, a wavefront sensor, a lens selection system including a plurality of optical lenses, a suitable optical lens of which is commensurate with the sample and selected to be disposed in the optical path and a light source directed in a first direction through the optical path by the beam splitter through the suitable optical lens and the sample to the mirror such that the light source is redirected in a second direction opposite the first direction through the optical path and the beam splitter, the aperture and the imaging lens to be received at the wavefront sensor.
A wavefront tester for measuring the wavefront comprising the wedge angle of a sample via an optical path, said wavefront tester comprising:
A wavefront tester for measuring the wavefront comprising the wedge angle of a sample via an optical path, said wavefront tester comprising:
Dependencies are inferred from the claim text.