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US 12,497,691 B2Granted
Devices having a rare earth (oxy) fluoride coating for improved resistance to corrosive chemical environments and methods for making and using these devices
AssigneeL'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
InventorsTakashi Teramoto, Christian Dussarrat, Grigory Nikiforov, Nicolas Blasco, Jean-Marc Girard, Takashi Ono, Keishi Yamamoto, Masato Hirai, Sunao Kamimura
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Abstract
A genus of rare earth containing chemicals is disclosed. These rare earth containing chemicals are suitable for use in sequential vapor deposition processes to form rare earth fluoride or rare earth oxyfluoride films. Such films may be used to protect materials and devices from corrosive chemicals.
Claims8
A chemical of the formula:
- M(FAB)3·DY
- wherein M is a Yttrium,
- wherein FAB is hexafluoroacetylacetone, and
- wherein D is Ethylene glycol ethyl methyl ether with y=1.
1 more element
Dependencies are inferred from the claim text.