Yttria-zirconia sintered ceramics for plasma resistant materials

Abstract

Disclosed is a ceramic sintered body comprising yttrium oxide and zirconium oxide wherein the ceramic sintered body comprises not less than 75 mol % to not greater than 95 mol % yttrium oxide and not less than 5 mol % to not greater than 25 mol % zirconium oxide, wherein the ceramic sintered body comprises porosity in an amount of less than 2% by volume, wherein a density of the ceramic sintered body does not vary by more than 2% relative to theoretical density across a greatest dimension. The ceramic sintered body has a grain size of from 0.4 to less than 2 um as measured according to ASTM E1 12-2010. The ceramic sintered body may be machined into plasma resistant components for use in plasma processing chambers. Methods of making are also disclosed.

Dependencies are inferred from the claim text.