System and method for array of MEMS elements

A method, comprising:

• depositing a spacer material over a substrate;
• patterning the spacer material to form patterned spacer material;
• depositing a metal layer over the patterned spacer material;
• depositing an oxide film over the metal layer;
• etching a portion of the oxide film, wherein the oxide film remains at a sidewall and a bottom of the patterned spacer material;
• patterning the metal layer with a pattern;
• etching the pattern into the metal layer;
• depositing a first layer of an organic polymer over the metal layer;
• baking the first layer of the organic polymer;
• depositing a second layer of the organic polymer over the first layer of the organic polymer;
• baking the second layer of the organic polymer;
• and
• etching the organic polymer.

A method for manufacturing a phase light modulator, the method comprising:

• forming a via for a hinge of the phase light modulator (PLM);
• depositing metal in the via to form the hinge;
• depositing a first layer of an organic polymer over the hinge;
• baking the first layer of the organic polymer;
• depositing a second layer of the organic polymer on the first layer of the organic polymer after baking the first layer of the organic polymer;
• baking the second layer of the organic polymer;
• and
• etching the first layer and the second layer of the organic polymer to reveal a portion of the hinge of the PLM.