Polishing fixing device and polishing apparatus

A polishing apparatus comprising:

• a polishing device for polishing a workpiece;
• at least one polishing fixing device comprising:
• a rotating mechanism for fixing and driving a workpiece to rotate relative to a polishing assembly, and the workpiece polished by the polishing assembly;
• a sensor coupled to the rotating mechanism, and the sensor for sensing a force applied on the workpiece when the workpiece being polished;
• a movement compensation assembly connected to the rotating mechanism and coupled to the sensor, and the movement compensation assembly for driving the rotating mechanism to move relative to a polishing assembly, thereby regulating the force applied on the workpiece;
• a first moving assembly connected to the movement compensation assembly, and the first moving assembly for driving the movement compensation assembly and the rotating mechanism to move along a first direction, to make the workpiece move along the first direction to be polished;
• a second moving assembly connected to the first moving assembly, and the second moving assembly for driving the first moving assembly to move along a second direction, to make the workpiece move along the second direction to be polished;
• and
• a connecting plate arranged between the rotating mechanism and the sensor, the connecting plate being connected to the rotating mechanism and the sensor;
• wherein the sensor is arranged between the connecting plate and the movement compensation assembly and is connected to the rotating mechanism and the movement compensation assembly;
• and wherein the sensor comprises a sensing housing and a sensing member disposed in the sensing housing, one side of the connecting plate facing the sensing housing is provided with a butting portion, when the connecting plate is connected to the sensing housing, the butting portion is butted against the sensing member;
• a controller coupled to the polishing fixing device, and the controller for controlling the at least one of the polishing fixing device to drive the workpiece to rotate relative to a processing station, to move along the first direction and move along the second direction, thereby the workpiece being moved relative to the polishing device for polishing;
• and
• a rotating device coupled to the controller, and connected to the at least one polishing fixing device;
• wherein the controller controls the rotating device to rotate relative to the processing station, to drive the at least one polishing fixing device to the processing station, to be correspondingly positioned to the polishing device.