Method and apparatus for extracting noise defect, and storage medium storing instructions to perform method for extracting noise defect

An apparatus for identifying defects in a semiconductor wafer, the apparatus comprising:

• a memory configured to store one or more instructions and a plurality of abnormal value calculators for calculating abnormal values using each of a variety of predetermined calculation methods;
• and
• a processor configured to execute the one or more instructions stored in the memory, wherein the instructions, when executed by the processor, cause the processor to:
• obtain defect data of a wafer bin map (WBM) of the semiconductor wafer including data on a plurality of electrical defects within the semiconductor wafer,
• determine one of a plurality of abnormal value calculators and calculate an abnormal value for each of the plurality of defects using one of the plurality of abnormal value calculators,
• generate a frequency histogram of a frequency of each of the plurality of defects using the abnormal value,
• calculate similarity between the plurality of defects using the frequency histogram for each of the plurality of defects,
• extract a noise defect from the plurality of defects based on the similarity, and
• remove the noise defect from the defect data of the WBM,
• wherein the abnormal values include a value representing a degree of defect within the semiconductor wafer.

A non-transitory computer readable storage medium storing computer executable instructions, wherein the instructions, when executed by a processor, cause the processor to perform a method of identifying defects in a semiconductor wafer, the method comprising:

• obtaining defect data of a wafer bin map (WBM) of the semiconductor wafer including data on a plurality of electrical defects within the semiconductor wafer,
• determining one of a plurality of abnormal value calculators for calculating abnormal values using each of a variety of predetermined calculation methods and calculating an abnormal value for each of the plurality of defects using one of the plurality of abnormal value calculators,
• generating a frequency histogram of a frequency of each of the plurality of defects using the abnormal value,
• calculating similarity between the plurality of defects using the frequency histogram for each of the plurality of defects,
• extracting a noise defect from the plurality of defects based on the similarity, and
• removing the noise defect from the defect data of the WBM,
• wherein the abnormal values include a value representing a degree of defect within the semiconductor wafer.