Vibration device and method for manufacturing vibration device
AssigneeSeiko Epson Corporation
InventorKoji Kitahara
Life of this patent
Estimating the term…
Abstract
A vibration device includes a base having a first surface and a second surface that is in a front-back relationship with the first surface, a vibrator disposed at the first surface, and a lid having a first recess that opens toward the first surface, a third surface that is the bottom surface of the first recess, and a fourth surface that is in a front-back relationship with the third surface, the lid being so bonded to the first surface that the vibrator is encapsulated in the first recess, and the lid has a second recess that is part of the third surface recessed toward the fourth surface and includes a diaphragm formed of the bottom surface of second recess and the fourth surface.
Claims7
A vibration device comprising:
- a base having a first surface and a second surface that is in a front-back relationship with the first surface;
- a vibrator disposed at the first surface;
- and
- a lid having a first recess that opens toward the first surface, a third surface that is a bottom surface of the first recess, and a fourth surface that is in a front-back relationship with the third surface, the lid being so bonded to the first surface that the vibrator is encapsulated in the first recess,
- wherein the lid has a second recess that is part of the third surface recessed toward the fourth surface and includes a diaphragm formed of a bottom surface of the second recess and the fourth surface, and
- the diaphragm is configured to displace due to changes in an internal pressure in a space in which the vibrator is sealed.
A method for manufacturing a vibration device, the method comprising:
- preparing a base;
- mounting a vibrator on the base;
- preparing a lid;
- forming a first recess in the lid;
- forming a second recess further recessed from the first recess;
- bonding the lid to the base in such a way that the vibrator is accommodated in the first recess and encapsulated by the lid and the base;
- processing a surface, of the lid, opposite from the second recess to produce a thin-plate structure;
- and
- inspecting a state of airtightness of a sealed section where the vibrator is encapsulated,
- wherein the inspecting includes, measuring displacement of a diaphragm formed of a bottom surface of the second recess and a surface, of the lid, opposite from the second recess.
Dependencies are inferred from the claim text.