Silicon flexible connectors
AssigneeNorthrop Grumman Systems Corporation
InventorsEdward R. Engbrecht, Jeffrey David Hartman, Justin C. Hackley
Life of this patent
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Abstract
An electrical connection device is provided that includes a first electrical connector having first electrical contacts formed therein and a second electrical connector having second electrical contacts formed therein. A flexible silicon connector section connects the first electrical connector and the second electrical connector. The connector section includes flexible strands separated by slots, where the flexible strands are flexible in directions orthogonal to a longitudinal direction of the connector section. The flexible strands include metal traces deposited therein to provide an electrical connection between the first electrical connector and the second electrical connector.
Claims20
An electrical connection device comprising:
- a first electrical connector having first electrical contacts formed therein;
- a second electrical connector having second electrical contacts formed therein;
- and
- a flexible silicon connector section connecting the first electrical connector and the second electrical connector, the connector section comprising flexible strands separated by slots, the flexible strands being flexible in directions orthogonal to a longitudinal direction of the connector section, the flexible strands including metal traces deposited therein to provide an electrical connection between the first electrical connector and the second electrical connector.
A method comprising:
- providing a single piece of silicon material having metal traces disposed therein;
- depositing an electrically conductive material in vias formed in each end of the single piece of silicon material via a first etching process to form contacts that connect with the metal traces;
- forming slots in a connector section of the single piece of silicon material via a second etching process, the slots being defined between strands of the connector section;
- and
- etching via a third etching process a backside of an exposed portion of the connector section of the single piece of silicon material to form an opening such that the slots extend through the connector section to thereby release the strands.
A method comprising:
- providing a single piece of silicon material having metal traces disposed therein;
- depositing an electrically conductive material in vias formed in each end of the single piece of silicon material via a first etching process to form contacts that connect with the metal traces;
- forming slots in a portion of a connector section of the single piece of silicon material via a second etching process, the slots being defined between strands of the connector section;
- forming channels and integrated strands in a support structure area of the connector section via a third etching process, the channels being formed between the integrated strands;
- and
- etching via a fourth etching process a backside of an exposed portion of the connector section of the single piece of silicon material to form an opening such that the slots extend through the connector section to thereby release the strands and to form a support structure, the support structure comprised a base and the integrated strands attached to the base in the support structure area of the connector section.
Dependencies are inferred from the claim text.