Fast switching gas circuits and processing chambers, and related methods and apparatus, for gas stabilization

A process chamber, comprising:

• a processing volume at least partially defined by a chamber body;
• an injector operable to inject a first gas and a second gas into a plurality of zones of the processing volume;
• one or more gas lines connected to the injector and operable to flow the first gas and the second gas to the injector;
• one or more valve assemblies connected to the one or more gas lines, the one or more valve assemblies comprising:
• a plurality of valves operable to open and close the respective flow of the first gas and the second gas,
• a first supply line, and
• a second supply line,
• one or more first flow controllers operable to flow the first gas to the one or more valve assemblies, and
• one or more second flow controllers operable to flow the second gas to the one or more valve assemblies, wherein the one or more valve assemblies further comprise a vent line, wherein the plurality of valves comprise:
• a first valve operable to flow the first gas to the injector when open;
• and
• a first vent valve operable to flow the first gas to the vent line when open, and when the first valve is closed.

A method for substrate processing, comprising:

• flowing an inert gas into a processing volume of a processing chamber through a first valve, wherein the processing chamber includes:
• an injector operable to inject a first gas and a second gas into a plurality of zones of the processing volume;
• one or more gas lines connected to the injector and operable to flow the first gas and the second gas to the injector;
• one or more valve assemblies connected to the one or more gas lines, the one or more valve assemblies comprising:
• a plurality of valves operable to open and close the respective flow of the first gas and the second gas,
• a first supply line, and
• a second supply line,
• one or more first flow controllers operable to flow the first gas to the one or more valve assemblies, and
• one or more second flow controllers operable to flow the second gas to the one or more valve assemblies, wherein the one or more valve assemblies further comprise a vent line, wherein the plurality of valves comprise:
• a first valve operable to flow the first gas to the injector when open;
• and
• a first vent valve operable to flow the first gas to the vent line when open, and when the first valve is closed
• flowing the first gas to the vent line through the first vent valve until a stabilization condition is met;
• and
• when the stabilization condition is met, switching the first gas to flow into the processing volume while the inert gas is flowing into the processing volume, the switching comprising:
• closing the first vent valve and opening a second valve while the first valve is open.