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US 12,493,243 B2Granted
Film-forming composition
AssigneeNissan Chemical Corporation
InventorsKodai Kato, Satoshi Takeda, Shuhei Shigaki, Wataru Shibayama, Makoto Nakajima
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Abstract
A film-forming composition for forming a resist underlayer film for a solvent development type resist that is capable of forming a good resist pattern which contains a hydrolysis-condensation product of a hydrolyzable silane compound, at least one substance that is selected from the group consisting of an aminoplast crosslinking agent and a phenoplast crosslinking agent, and a solvent, and wherein the hydrolyzable silane compound contains a hydrolyzable silane represented by formula (1).
Claims17
A film-forming composition comprising
- a hydrolysis condensate of a hydrolyzable silane compound,
- at least one selected from the group consisting of an aminoplast crosslinking agent and a phenoplast crosslinking agent, and
- a solvent,
- the film-forming composition wherein:
- the hydrolyzable silane compound contains a hydrolyzable silane of the following Formula (1):
- R1aR2bSi(R3)4-(a+b) (1)
- wherein R1 is a group bonded to the silicon atom via an Si—C bond, and is an organic group containing at least one structure selected from among an alkoxymethylbenzene structure, a phenoxy structure, and an epoxy structure;
- R2 is a group bonded to the silicon atom via an Si—C bond, and is each independently a substitutable alkyl group, a substitutable aryl group, a substitutable aralkyl group, a substitutable halogenated alkyl group, a substitutable halogenated aryl group, a substitutable halogenated aralkyl group, a substitutable alkoxyalkyl group, a substitutable alkoxyaryl group, a substitutable alkoxyaralkyl group, or a substitutable alkenyl group, or an organic group containing an epoxy group, an acryloyl group, a methacryloyl group, a mercapto group, an amino group, an amide group, an alkoxy group, or a sulfonyl group, or any combination of these;
- R3 is a group or atom bonded to the silicon atom, and is each independently a hydroxy group, an alkoxy group, an aralkyloxy group, an acyloxy group, or a halogen atom;
- a is an integer of 1;
- b is an integer of 0 to 2;
- and
- a+b is an integer of 1 to 3), and
- the hydrolyzable silane compound further contains a hydrolyzable silane of the following Formula (2):
- Si(R11)4 (2)
- wherein R11 is a group or atom bonded to the silicon atom, and is each independently a hydroxy group, an alkoxy group, an aralkyloxy group, an acyloxy group, or a halogen atom, and
- wherein the hydrolysis condensate contains a monomer unit of the hydrolyzable silane of Formula (1) in an amount of 0.1% by mole to 15% by mole.
14 more elements
Dependencies are inferred from the claim text.