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US 12,493,179 B2Granted
Micromechanical oscillation system
AssigneeRobert Bosch GmbH
InventorsHelmut Grutzeck, Frank Schatz, Johannes Baader, Josip Mihaljevic, Timo Schary
Life of this patent
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Abstract
A micromechanical oscillation system. The micromechanical oscillation system has a micromechanical oscillating body having at least one micromirror. In addition, the micromechanical oscillation system includes an electromagnetic drive unit which has a coil body and at least one magnet. The coil body essentially extends laterally to the micromirror. The at least one magnet extends underneath the coil body.
Claims9
A micromechanical oscillation system, comprising:
- a micromechanical oscillating body having at least one micromirror;
- and
- an electromagnetic drive unit including a coil body and at least two magnets, the coil body extending completely laterally to the micromirror, the coil body extending laterally in a top view in a direction of an axis of symmetry of the micromirror, and the at least two magnets extending underneath the coil body, the at least two magnets extending underneath in the top view in the direction of the axis of symmetry of the micromirror,
- wherein the at least two magnets are situated at a distance from each other, and at least one first and one second magnetic flux guide for conducting the magnetic field lines in a direction of the coil body are situated between the at least two magnets,
- wherein the at least one first and one second magnetic flux guides are curved and at least partially shield the at least two magnets from an external environment.
2 more elements
A micro-projection device, comprising:
- a micromechanical oscillation system including:
- a micromechanical oscillating body having at least one micromirror;
- and
- an electromagnetic drive unit including a coil body and at least two magnets, the coil body completely extending laterally to the micromirror, the coil body extending laterally in a top view in a direction of an axis of symmetry of the micromirror, and the at least two magnets extending underneath the coil body, the at least one magnet extending underneath in the top view in the direction of the axis of symmetry of the micromirror, the at least two magnets being situated at a distance from each other, and at least one first and one second magnetic flux guide for conducting the magnetic field lines in a direction of the coil body being situated between the at least two magnets, wherein the at least one first and one second magnetic flux guides are curved and at least partially shield the at least two magnets from an external environment.
1 more element
Dependencies are inferred from the claim text.