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US 12,493,014 B2Granted
Nanostructure platform for cellular interfacing and corresponding fabrication method
AssigneeCentre National De La Recherche Scientifique
InventorsGuilhem Larrieu, Adrien Casanova
Life of this patent
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Abstract
A platform for cellular interfacing including at least one nano-probe based on nano-wires each having a conductive extremity intended to be in contact with a cell. The platform has at least one field-effect transistor called a nano-FET positioned at a predetermined distance from the nano-probe.
Claims15
A platform for cellular interfacing comprising:
- a substrate;
- a plurality of nano-probes fabricated on said substrate, each comprising one or more vertical nano-wires, each being directly connected to a conductive line of access on the substrate and including a conductive extremity configured to contact a cell;
- a plurality of field-effect transistors called nano-FETs, fabricated on said substrate, jointly with the nano-probes;
- and
- a set of nano-sensors, each nano-sensor comprising one of the nano-probes and one of the nano-FETs positioned at a predetermined distance from said nano-probe.
2 more elements
A method for fabricating a platform for intracellular interfacing, of a top-down type, wherein the method comprises:
- forming a plurality of nano-probes on a substrate including vertically structuring one or more vertical nano-wires on the substrate, each vertical nano-wire being directly connected to a conductive line of access on the substrate and including a conductive extremity configured to contact a cell;
- and
- planar structuring at least one field-effect transistor called a nano-FET on said substrate,
- wherein a set of nano-sensors are formed on the substrate, each nano-sensor comprising one of the nano-probes and one of the nano-FETs positioned at a predetermined distance from said nano-probe.
1 more element
Dependencies are inferred from the claim text.