Method for determining parameters of three dimensional nanostructure and apparatus applying the same
AssigneeIndustrial Technology Research Institute
InventorsChun-Ting Liu, Po-Ching He, Wei-En Fu, Chun-Yu Liu
Life of this patent
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Abstract
A method for determining parameters of nanostructures, wherein the method includes steps as follows: Firstly, an X-ray reflection intensity measurement curve of a nanostructure to be tested is obtained by radiating the nanostructure to be tested with X-ray. The X-ray reflection intensity measurement curve is compared with an X-ray reflection intensity standard curve to obtain a comparison result. Subsequently, at least one parameter existing in the nanostructure to be tested is determined according to the comparison result.
Claims16
A method for determining parameters of nanostructures, comprising:
- obtaining an X-ray reflection intensity measurement curve of a nanostructure to be tested by radiating the nanostructure to be tested with an X-ray;
- comparing the X-ray reflection intensity measurement curve with an X-ray reflection intensity standard curve to obtain a comparison result;
- and
- determining at least one parameter existing in the nanostructure to be tested according to the comparison result.
An apparatus for determining parameters of nanostructures, comprising:
- an X-ray light source, used for emitting an X-ray
- an X-ray reflector, used to focus the X-ray on a surface of a nanostructure to be tested by adjusting an incident angle of the X-ray within a preset angle range;
- an X-ray detector, used to collect X-ray reflection lines reflected from surfaces;
- and
- a parameters determining module used for:
- obtaining an X-ray reflection intensity measurement curve according to a reflection intensity of the X-ray reflection lines;
- comparing the X-ray reflection intensity measurement curve with an X-ray reflection intensity standard curve to obtain a comparison result;
- and
- determining at least one parameter existing in the nanostructure to be tested according to the comparison result.
Dependencies are inferred from the claim text.