Stage assembly with vent structure for preventing condensation

Abstract

The present invention relates to a stage assembly with a vent structure for preventing condensation by making a flow path in the stage so that air around the vessel on the stage passes through the inside of the equipment for making the temperature of a stage-direction surface of a vessel similar to the ambient temperature of the vessel to prevent condensation. In addition, the present invention relates to the stage assembly with the vent structure to reduce cost, prevent stenosis due to exposure of the drive, and improve antifouling function due to blocking of foreign substances, by simplifying the structure and reducing parts so that all drive parts can be mounted in a space smaller than the diameter of a knob for driving the stage, and applying a scotch yoke mechanism so that a rotary shaft connected to the knob per se is a drive to make a linear motion.

Dependencies are inferred from the claim text.