Packaging for a sensor and methods of manufacturing thereof

A gas flow sensor configured to couple to a gas flow tube via a flange, the gas flow sensor comprising:

• a dielectric substrate comprising an outer region, an inner region, and a middle region positioned between the outer region and the inner region, the dielectric substrate comprising one or more electrical contact pads formed between layers of the dielectric substrate, wherein the one or more electrical contact pads extend at least partially through the dielectric substrate from the outer region to the inner region;
• a housing coupled to the dielectric substrate by a flange at the middle region, the flange to form a hermetic seal between the housing and the dielectric substrate, wherein the one or more electrical contact pads extend beyond the housing on an outermost surface of the dielectric substrate at the inner region, wherein the housing has a first end and a second end, each configured to be coupled to a fluid flow channel;
• and
• a sensor die coupled to the dielectric substrate at the inner region via the electrical contact pads, wherein the sensor die is aligned to the dielectric substrate via one or more alignment features in at least one of a first plane or a second plane, wherein the one or more alignment features are formed on at least one outermost surface of the substrate at the inner region.

A method of manufacturing a sensor assembly, the method comprising:

• providing a substrate comprising an outer region, an inner region, and a middle region positioned between the outer region and the inner region, the substrate further comprising one or more electrical contact pads on at least the inner region;
• aligning a sensor die to the substrate at the inner region via one or more alignment features in at least one of a first plane or a second plane, wherein the one or more alignment features are formed on at least one outermost surface of the substrate at the inner region;
• coupling the sensor die to the substrate at the inner region;
• and
• coupling the substrate to a housing by a flange at the middle region or the outer region, the flange to provide a hermetic seal between the housing and the substrate, wherein the one or more electrical contact pads extend beyond the housing on an outermost surface of the substrate at the inner region, wherein the housing has a first end and a second end, each configured to be coupled to a fluid flow channel.