Mounting structure of micro vibrator

A mounting structure comprising:

• a micro vibrator that includes a curved surface portion having an annular curved surface and a connecting portion extending from the curved surface portion toward an inner center position of the curved surface portion;
• and
• a mounting substrate that includes a plurality of electrode portions arranged to face and surround a rim of the curved surface portion of the micro vibrator, the plurality of electrode portions being spaced apart from each other around an outer perimeter of the rim, the rim being an end of the curved surface portion disposed on an outer periphery of the connecting portion, wherein
• the micro vibrator is bonded to the mounting substrate at the connecting portion so that the curved surface portion is separated from and spaced apart from the mounting substrate so as to define a space therein,
• the plurality of electrode portions each include
• a base portion having a facing surface facing the rim on a radial exterior of the rim, and an upper surface different from the facing surface and facing away from a bottom portion of the base portion which is disposed on a base of the mounting substrate,
• an insulating film covering at least the upper surface of the base portion, and
• a guard electrode covering at least the upper surface of the base portion above the insulating film and being electrically independent of the base portion.