Air shrouds with integrated heat exchanger
AssigneeApplied Materials, Inc.
InventorsAbraham Palaty, Vinodh Ramachandran, Shu-Kwan Lau, Shainish Nellikka, Raja Murali Dhamodharan, Danny D. Wang
Life of this patent
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Abstract
A heating module for a substrate processing chamber includes heating lamps coupled to a reflector plate and a heat exchanger. The heat exchanger cools a gas within the heating module. A fan within the heating module circulates the gas through apertures in the reflector plate to cool the heating bulbs. The gas is cooled by the heat exchanger, and is recirculated. One or more shrouds directs the gas as the gas is being circulated.
Claims14
A heating module for a process chamber suitable for use in semiconductor manufacturing, the heating module comprising:
- an outer housing including a sidewall extending to a lid;
- a reflector plate disposed in the outer housing;
- a plurality of heating lamps associated with the reflector plate;
- and
- a first heat exchange module disposed in the outer housing between the reflector plate and the lid, the first heat exchange module including:
- a plurality of first heat exchange tubes disposed between a first inner shroud and a first outer shroud;
- and
- a baffle extending from the first outer shroud to the lid.
A processing chamber suitable for use in semiconductor manufacturing, comprising:
- a chamber body including a upper window disposed above a lower window, the upper window and the lower window forming boundaries of a processing volume;
- and
- an upper heating module coupled to the chamber body above the upper window, the upper heating module including:
- a first outer housing including a sidewall extending to a first lid;
- a first reflector plate disposed in the first outer housing;
- a plurality of first heating lamps associated with the first reflector plate;
- and
- a first heat exchange module disposed in the first outer housing between the first reflector plate and the first lid, the first heat exchange module including a plurality of first heat exchange tubes disposed between a first inner shroud and a first outer shroud;
- and
- a baffle extending from the first outer shroud to the first lid.
Dependencies are inferred from the claim text.