Fireproof door apparatus, fireproof structure and substrate treating facility
AssigneeSemes Co., Ltd.
InventorsMin Beom Kim, Eun Sang Yoon, Nam Ho Chung, Doo Hyun Baek
Life of this patent
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Abstract
Provided are a fireproof door apparatus, a fireproof structure, and a substrate treating facility. The fireproof door apparatus includes a fireproof shutter opening and closing a passage connecting two spaces, a release unit installed on one side of the passage and in the fireproof shutter and fixing the fireproof shutter in an open state using magnetic force or releasing the fireproof shutter that is fixed, and a gas spring connected to the fireproof shutter and moving the fireproof shutter toward the passage by heat of the fire to close the passage.
Claims20
A fireproof door apparatus comprising:
- a fireproof shutter opening and closing a passage connecting two spaces;
- a release unit installed on one side of the passage and in the fireproof shutter and fixing the fireproof shutter in an open state using magnetic force or releasing the fireproof shutter that is fixed;
- and
- a gas spring connected to the fireproof shutter and moving the fireproof shutter toward the passage by heat of the fire to close the passage.
A fireproof structure comprising:
- a plurality of stories, each having a space formed therein;
- a passage connecting a plurality of spaces of the plurality of stories;
- and
- a fireproof door apparatus closing the passage in the event of a fire,
- wherein the fireproof door apparatus includes:
- a fireproof shutter opening and closing the passage;
- a release unit installed on one side of the passage and in the fireproof shutter and fixing the fireproof shutter in an open state using magnetic force or releasing the fireproof shutter that is fixed;
- and
- a gas spring connected to the fireproof shutter and moving the fireproof shutter toward the passage by heat of the fire to close the passage.
A substrate treating facility comprising:
- a fireproof structure including a fireproof door apparatus opening and closing a passage of a plurality of stories;
- and
- a vertical transfer device disposed to penetrate through the passage,
- wherein the fireproof structure includes:
- the plurality of stories each having a space inside which a substrate treating apparatus is installed;
- the passage connecting a plurality of spaces of the plurality of stories;
- and
- the fireproof door apparatus closing the passage in the event of a fire,
- wherein the fireproof door apparatus includes:
- a fireproof shutter opening and closing the passage;
- a release unit installed on one side of the passage and in the fireproof shutter and fixing the fireproof shutter in an open state using magnetic force or releasing the fireproof shutter that is fixed;
- and
- a gas spring connected to the fireproof shutter and moving the fireproof shutter toward the passage by heat of the fire to close the passage.
Dependencies are inferred from the claim text.