Single crystal manufacturing method, magnetic field generator, and single crystal manufacturing apparatus
AssigneeSumco Corporation
InventorsNaoki Matsushima, Ryusuke Yokoyama
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AssigneeSumco Corporation
InventorsNaoki Matsushima, Ryusuke Yokoyama
Estimating the term…
Provided a single crystal manufacturing method, a magnetic field generator, and a single crystal manufacturing apparatus, which allow the in-plane distribution of oxygen concentration in a single crystal to be uniform. A single crystal manufacturing method includes pulling-up a single crystal while applying a lateral magnetic field to a melt in a crucible. During a crystal pull-up process, the crucible is raised to meet the decrease in the melt, and a magnetic field distribution is controlled to meet the decrease in the melt in such a manner that the direction of the magnetic field at the melt surface and the direction of the magnetic field at the inner surface of a curved bottom portion of the crucible are constant from the beginning to the end of a body section growing step.
A single crystal manufacturing method for pulling-up a single crystal while applying a lateral magnetic field to a melt in a crucible, comprising:
Dependencies are inferred from the claim text.