Ceramic sintered body and plasma-generating electrode
AssigneeNiterra Co., Ltd.
InventorsTsuneyuki Ito, Shinji Ban, Osamu Yoshimoto, Tomoo Tanaka
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AssigneeNiterra Co., Ltd.
InventorsTsuneyuki Ito, Shinji Ban, Osamu Yoshimoto, Tomoo Tanaka
Estimating the term…
A ceramic sintered body contains a first particular element consisting of five or six elements selected from among titanium (Ti), vanadium (V), zirconium (Zr), niobium (Nb), molybdenum (Mo), hafnium (Hf), tantalum (Ta), and tungsten (W); a second particular element consisting of one element selected from yttrium (Y) and aluminum (Al); and elemental carbon (C). The total amount of the first particular element, the second particular element, and elemental carbon is 98 at % or more. The ceramic sintered body has a plurality of microstructures having respective compositions different from one another. One of the plurality of microstructures includes a solid solution containing at least three members of the first particular element.
A ceramic sintered body, which comprises
Dependencies are inferred from the claim text.