Corrosion tolerant micro-electromechanical fluid ejection device

An apparatus to receive a fluid having corrosive attributes, the apparatus comprising:

• a thermal oxide layer on a substrate;
• a doped dielectric film over the thermal oxide layer;
• a fluid port to receive a fluid and defined by an aperture, the aperture including a selectively removed portion of the doped dielectric film, wherein the aperture is defined by a wall of the doped dielectric film;
• and
• an un-doped dielectric film over the wall of the doped dielectric film, wherein the un-doped dielectric film protects the doped dielectric film from corrosive attributes of the fluid.

An apparatus, comprising:

• a field oxide layer over a substrate;
• the doped dielectric film over the field oxide layer;
• a metal layer over the doped dielectric film;
• and
• an aperture disposed in a region of the microfluidic device to eject fluid, wherein the aperture is defined by a wall of the doped dielectric film;
• and
• an un-doped dielectric film over the wall of the doped dielectric film to protect the doped dielectric film of the monolithic integrated circuit from corrosive attributes of the fluid.