Methods for cleaning the pull cable of an ingot puller apparatus
AssigneeGlobalWafers Co., Ltd.
InventorsChin-Hung Ho, Chih-Kai Cheng, Chen-Yi Lin, Feng-Chien Tsai, Tung-Hsiao Li, YoungGil Jeong, Jin Yong Uhm
Life of this patent
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Abstract
Cleaning tools for cleaning the pull cable of an ingot puller apparatus and methods for cleaning the pull cable are disclosed. The cleaning tool includes a chamber for receiving the pull cable. Pressurized fluid is discharged through one or more nozzles to detach debris from the pull cable. The fluid and debris are collected in an exhaust plenum of the cleaning tool and are expelled through an exhaust tube. The cleaning tool includes one or more guides that guide the cleaning tool in an upper segment of the ingot puller apparatus.
Claims9
A method for cleaning a pull cable of an ingot puller apparatus, the ingot puller apparatus comprising a crystal puller housing that defines a growth chamber for pulling a silicon ingot from a silicon melt, the crystal puller housing comprising a lower dome-shaped segment and an upper cylindrical-shaped segment that is removably connected to the lower dome-shaped segment, the method comprising:
- separating the upper cylindrical-shaped segment from the lower dome-shaped segment;
- positioning the pull cable within a chamber of a cleaning tool;
- directing pressurized fluid toward the pull cable;
- removing the pressurized fluid that is directed toward the pull cable through an exhaust plenum of the cleaning tool for processing the pressurized fluid;
- moving the cleaning tool relative to the pull cable while directing pressurized fluid toward the pull cable and while removing the pressurized fluid through the exhaust plenum for processing the pressurized fluid;
- and
- moving the cleaning tool through the upper cylindrical-shaped segment of the ingot puller apparatus, the cleaning tool comprising one or more outer guides, the one or more outer guides guiding the cleaning tool within the upper cylindrical-shaped segment.
Dependencies are inferred from the claim text.