DC block and plasma generator using the same

A DC block wherein two high-frequency power transmission antennas formed on two microstrip lines, respectively, are disposed to face each other with an insulating sheet interposed between the two high-frequency power transmission antennas, wherein

• each of the high-frequency power transmission antennas includes a feeder line connected to an inner conductor of a coaxial line that transmits high-frequency power, and
• on one of the microstrip lines, a wiring pattern configured to electrically connect the high-frequency power transmission antenna and a voltage application circuit configured to apply a direct-current voltage to the a plasma generation antenna connected to the inner conductor of the coaxial line is formed, the plasma generation antenna is different from the two high-frequency power transmission antennas.

A plasma generator comprising:

• a plasma generation chamber that is a container configured to generate plasma by discharge using high-frequency power and accelerate the generated plasma by high-voltage direct-current power;
• a DC block disposed on a transmission line configured to transmit the high-frequency power to the plasma generation chamber, the DC block transmitting only the high-frequency power and cutting off direct-current power, wherein
• the DC block has the configuration that two high-frequency power transmission antennas formed on two microstrip lines, respectively, are disposed to face each other with an insulating sheet interposed between the two high-frequency power transmission antennas.