Wet etch apparatus
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHong-Ting Lu, Han-Wen Liao
Life of this patent
Estimating the term…
Abstract
A wet etch apparatus includes a wafer chuck, a dispensing nozzle above the wafer chuck, a rail, first and second vehicles, and an electric field generator. The rail extends at least from a first position aligned laterally with the wafer chuck to a second position higher than a top surface of the wafer chuck. The first and second vehicles are movable along the rail. The electric field generator is operative to generate an electric field across the wafer chuck. The electric field generator comprises a first electrode carried by the first vehicle and a second electrode carried by the second vehicle.
Claims20
A wet etch apparatus, comprising:
- a wafer chuck;
- a dispensing nozzle above the wafer chuck;
- a rail extending at least from a first position aligned laterally with the wafer chuck to a second position higher than a top surface of the wafer chuck;
- first and second vehicles movable along the rail;
- and
- an electric field generator operative to generate an electric field across the wafer chuck, wherein the electric field generator comprises a first electrode carried by the first vehicle and a second electrode carried by the second vehicle.
A wet etch apparatus, comprising:
- a wafer chuck;
- a dispensing nozzle above the wafer chuck;
- a rail extending at least from a first position below a top surface of the wafer chuck to a second position above the top surface of the wafer chuck;
- first and second vehicles movable along the rail;
- and
- an electric field generator operative to generate an electric field across the wafer chuck, wherein the electric field generator comprises a first electrode carried by the first vehicle and a second electrode carried by the second vehicle.
A wet etch apparatus, comprising:
- a wafer chuck;
- a dispensing nozzle above the wafer chuck;
- a rail encircling the wafer chuck;
- first and second vehicles movable along the rail;
- and
- an electric field generator operative to generate an electric field across the wafer chuck, wherein the electric field generator comprises a first electrode carried by the first vehicle and a second electrode carried by the second vehicle.
Dependencies are inferred from the claim text.