X-ray source
AssigneeKETEK GmbH Halbleiter- und Reinraumtechnik
InventorsFelix Düsberg, Florian Schneider, Michael Bachmann, Andreas Pahlke
Life of this patent
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Abstract
In an embodiment an X-ray source includes an electron source configured to emit electrons, an acceleration set-up configured to accelerate the emitted electrons and a transmission window downwards of the acceleration set-up, wherein the transmission window is configured to let through X-rays generated by the accelerated electrons, wherein the transmission window is located either in a straight extension of a line-of-flight of the accelerated electrons or off the line-of-flight and past the acceleration set-up, wherein the transmission window comprises a carbon carrier, and wherein the carbon carrier comprises sp2-hybridized carbon.
Claims15
An X-ray source comprising:
- an electron source configured to emit electrons;
- an acceleration set-up configured to accelerate the emitted electrons;
- and
- a transmission window downwards of the acceleration set-up,
- wherein the transmission window is configured to let through X-rays generated by the accelerated electrons,
- wherein the transmission window is located in a straight extension of a line-of-flight of the accelerated electrons and past the acceleration set-up,
- wherein the transmission window comprises a carbon carrier,
- wherein the carbon carrier comprises sp2-hybridized carbon, and
- wherein the carbon carrier is an electron target and is configured to generate the X-rays of a characteristic carbon X-ray line based on being hit by the accelerated electrons.
An X-ray source comprising:
- an electron source configured to emit electrons;
- an acceleration set-up configured to accelerate the emitted electrons;
- and
- a transmission window downwards of the acceleration set-up,
- wherein the transmission window is configured to let through X-rays generated by the accelerated electrons,
- wherein the transmission window is located off a line-of-flight of the accelerated electrons and past the acceleration set-up,
- wherein the transmission window comprises a carbon carrier,
- wherein the carbon carrier comprises sp2-hybridized carbon,
- wherein the carbon carrier is of pyrolytic carbon,
- wherein a thickness of a carbon layer is at most 10 μm,
- wherein a mass proportion of carbon of the transmission window in an area configured to be passed by the X-rays is at least 90%, and
- wherein the acceleration set-up is configured for an acceleration voltage of at most 1.5 kV.
An X-ray source comprising:
- an electron source configured to emit electrons;
- an acceleration set-up configured to accelerate the emitted electrons;
- and
- a transmission window downwards of the acceleration set-up,
- wherein the transmission window is configured to let through X-rays generated by the accelerated electrons,
- wherein the transmission window comprises a carbon carrier,
- wherein the carbon carrier comprises sp2-hybridized carbon,
- wherein the acceleration set-up is configured for an acceleration voltage of at most 5 kV,
- wherein the transmission window is located off a line-of-flight and past the acceleration set-up so that the transmission window is a side window,
- wherein the accelerated electrons are divertible from the transmission window,
- wherein the carbon carrier is of pyrolytic carbon,
- wherein a thickness of a carbon layer is at most 10 μm,
- wherein a mass proportion of carbon of the transmission window in an area configured to be passed by the X-rays is at least 90%, and
- wherein a low-voltage side and a high-voltage side of an electronics unit are connected by a one-stage voltage changer, the electronics unit is configured to provide the acceleration voltage.
An X-ray source comprising:
- an electron source configured to emit electrons;
- an acceleration set-up configured to accelerate the emitted electrons;
- and
- a transmission window downwards of the acceleration set-up,
- wherein the transmission window is configured to let through X-rays generated by the accelerated electrons,
- wherein the transmission window is located off a line-of-flight of the accelerated electrons and past the acceleration set-up,
- wherein the transmission window comprises a carbon carrier,
- wherein the carbon carrier comprises sp2-hybridized carbon,
- wherein the transmission window is a side window,
- wherein the accelerated electrons are divertible from the transmission window,
- wherein a thickness of a carbon layer is at most 25 μm, and
- wherein a mass proportion of carbon of the transmission window in an area configured to be passed by the X-rays is at least 90%.
Dependencies are inferred from the claim text.