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US 12,488,938 B2Granted
Variable inductor device comprising first and second planar loops configured to be separable by pivoting about a hinge
AssigneeLam Research Corporation
InventorDavid Michael French
Life of this patent
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Abstract
In some examples, a variable inductor device includes a first planar loop comprising a first planar face and a material that supports electromagnetic coupling and a second planar loop comprising a second planar face and a material that supports electromagnetic coupling. The first planar loop is separable from the second planar loop to vary the inductance of the variable inductance device. In some examples, the first and second planar faces overlapping each other in a closed configuration of the device.
Claims20
A variable inductor device including:
- a first planar loop comprising a first planar face;
- a second planar loop comprising a second planar face;
- the first planar loop separable from the second planar loop to vary an inductance of the variable inductor device;
- the first and second planar faces overlapping each other in a closed configuration of the variable inductor device, and
- a hinge at which one of the first and second planar loops is hinged relative to the other one of the first and second planar loops,
- wherein the hinge is provided at a termination point of the first and second planar loops and/or,
- wherein the hinge is provided at an RF power terminal of the variable inductor device.
4 more elements
A variable inductor device including:
- a first planar loop comprising a first planar face;
- a second planar loop comprising a second planar face;
- a first hinge;
- a second hinge;
- a first end of the first planar loop and a first end of the second planar loop being connected by the first hinge, the second end of the first planar loop and the second end of the second planar loop being connected by the second hinge;
- the first planar loop separable from the second planar loop by pivoting about the first hinge and the second hinge to vary an inductance of the variable inductor device,
- the second end of the first planar loop having a first RF power terminal;
- and/or
- the second end of the second planar loop having a second RF power terminal.
6 more elements
Dependencies are inferred from the claim text.