Salt, acid generator, resist composition and method for producing resist pattern
AssigneeSumitomo Chemical Company, Limited
InventorsKatsuhiro Komuro, Saki Kato, Koji Ichikawa
Life of this patent
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Abstract
A salt capable of producing a resist pattern with satisfactory CD uniformity (CDU) represented by formula (I), an acid generator and a resist composition including the same: wherein R4, R5, R7 and R8 each represent a halogen atom, a haloalkyl group, etc., A1 and A2 each represent a hydrocarbon group, the group may have a substituent, —CH2— in the group may be replaced by —O—, —CO—, —S—, —SO2—, etc., X3 and X4 each represent —O— or —S—, m1 present an integer of 1 to 5, m2 and m8 represent an integer of 0 to 5, m4 and m5 represent an integer of 0 to 3, m7 represent an integer of 0 to 4, 1≤m1+m7≤5, 0≤m2+m8≤5, and AI− represents an organic anion.
Claims14
A salt represented by formula (I):
- wherein, in formula (I),
- R4, R5, R7 and R8 each independently represent a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, or a hydrocarbon group having 1 to 36 carbon atoms, the hydrocarbon group may have a substituent, and —CH2— included in the haloalkyl group and the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—,
- A1 and A2 each independently represent a hydrocarbon group having 1 to 20 carbon atoms, the hydrocarbon group may have a substituent, and —CH2— included in the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—,
- X3 and X4 each independently represent —O— or —S—,
- m1 represents an integer of 1 to 5, and when m1 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
- m2 represents an integer of 0 to 5, and when m2 is 2 or more, a plurality of groups in parentheses may be the same or different from each other,
- m4 represents an integer of 0 to 3, and when m4 is 2 or more, a plurality of R4 may be the same or different from each other,
- m5 represents an integer of 0 to 3, and when m5 is 2 or more, a plurality of R5 may be the same or different from each other,
- m7 represents an integer of 0 to 4, and when m7 is 2 or more, a plurality of R7 may be the same or different from each other,
- m8 represents an integer of 0 to 5, and when m8 is 2 or more, a plurality of R8 may be the same or different from each other,
- in which 1≤m1+m7≤5, 0≤m2+m8≤5, and
- AI− represents an organic anion.
Dependencies are inferred from the claim text.