Laser device and method of aligning laser device
AssigneeSamsung Display Co., Ltd.
InventorsSeong Jin Yeon, Voronov Alexander, Jun Ho Park, Je Kil Ryu
Life of this patent
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Abstract
A laser device includes a light source part; an optical path adjustment part; a light distribution part that splits a laser beam into a plurality of sub-beams to a substrate; a drive part that moves the light distribution part and adjusts relative positions between the light distribution part and the substrate; a sensing part; and a control part. The control part generates an image based on a signal sensed by the sensing part and measures an image contrast of the image. The control part records and compares a plurality of image contrasts according to the position of the light distribution part to determine an optimal position of the light distribution part.
Claims20
A laser device, comprising:
- a light source part that emits a laser beam;
- an optical path adjustment part that reflects the laser beam emitted from the light source part and adjusts an irradiation direction of the laser beam;
- a light distribution part that splits the laser beam reflected from the optical path adjustment part into a plurality of sub-beams and irradiates the plurality of sub-beams to a substrate;
- a drive part that moves the light distribution part and adjusts relative positions between the light distribution part and the substrate;
- a sensing part that senses the plurality of sub-beams emitted from the substrate;
- and
- a control part that adjusts an arrangement of the optical path adjustment part and moves the drive part to adjust an arrangement of the light distribution part, wherein
- the control part generates an image based on a signal sensed by the sensing part and measures an image contrast of the image,
- the control part records and compares a plurality of image contrasts according to the position of the light distribution part to determine an optimal position of the light distribution part,
- the light source part emits a first laser beam and aligns the light distribution part, and
- the light source part emits a second laser beam having a greater intensity than an intensity of the first laser beam for laser processing the substrate.
A method of aligning a laser device, the method comprising:
- adjusting a position of a light distribution part according to a signal of a control part by a drive part;
- detecting a plurality of sub-beams transmitted through or reflected from a substrate by a sensing part;
- recording a plurality of signals detected by the sensing part for each position of the light distribution part;
- aggregating the plurality of signals for each of a plurality of rows and columns to generate a plurality of graphs representing the detected signals for each row and column;
- converting the plurality of graphs into graph signals;
- generating an image using a raster scan method by dividing into rows/columns and converting signals row by row based on the plurality of signals recorded by the control part;
- and
- measuring a difference in brightness between a brightest portion and a darkest portion of the image and recording an image contrast by the control part.
Dependencies are inferred from the claim text.