Method and apparatus for determining concentration of compound in ultrapure water
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsEn-Tian Lin, Chiao-Ling Weng
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Abstract
A method for determining the concentration of a compound in ultrapure water is provided. The method includes dividing the ultrapure water into a first part and a second part and decomposing the compound in the first part, so that the first part includes a characteristic substance. The method also includes measuring a first concentration of the characteristic substance in the first part and a second concentration of the characteristic substance in the second part and calculating the difference between the first concentration and the second concentration. The method further includes obtaining the concentration of the compound in the ultrapure water based on the difference.
Claims20
A method for determining a concentration of a compound in ultrapure water, comprising:
- dividing the ultrapure water into a first part that flows through a first portion of a reactor and a second part that flows through a second portion of the reactor, wherein the reactor has a separation plate that divides an interior of the reactor into the first portion and the second portion;
- decomposing the compound in the first part, so that the first part comprises a characteristic substance;
- measuring a first concentration of the characteristic substance in the first part;
- measuring a second concentration of the characteristic substance in the second part;
- calculating a difference between the first concentration of the characteristic substance in the first part and the second concentration of the characteristic substance in the second part;
- and
- obtaining the concentration of the compound in the ultrapure water based on the difference.
An apparatus for determining a concentration of a compound in ultrapure water flowing through an ultrapure water system, comprising:
- a first pipe located downstream of the ultrapure water system;
- a second pipe located downstream of the ultrapure water system, wherein the second pipe is separated from the first pipe;
- a reactor provided on the first pipe and having a separation plate;
- and
- a measuring device located downstream of the ultrapure water system,
- wherein after the ultrapure water flows out of the ultrapure water system, the ultrapure water is divided into a first part flowing through the first pipe and a second part flowing through the second pipe,
- wherein the compound in the first part is decomposed in the reactor, so that the first part comprises a characteristic substance,
- wherein the measuring device measures a first concentration of the characteristic substance in the first part and a second concentration of the characteristic substance in the second part, and the concentration of the compound in the ultrapure water is obtained based on a difference between the first concentration of the characteristic substance in the first part and the second concentration of the characteristic substance in the second part.
An apparatus for determining a concentration of a compound in ultrapure water in an ultrapure water system, comprising:
- a reactor provided on a pipe of the ultrapure water system;
- and
- a measuring device coupled to the ultrapure water system,
- wherein the ultrapure water that flows through the reactor is divided into a first part and a second part,
- wherein the compound in the first part is decomposed in the reactor, so that the first part comprises a characteristic substance,
- wherein the measuring device measures a first concentration of the characteristic substance in the first part and a second concentration of the characteristic substance in the second part, and the concentration of the compound in the ultrapure water is obtained based on a difference between the first concentration of the characteristic substance in the first part and the second concentration of the characteristic substance in the second part, and
- wherein a first portion of the reactor through which the first part flows is provided with a catalyst, and a second portion of the reactor through which the second part flows is not provided with a catalyst.
Dependencies are inferred from the claim text.