Thermal conductivity vacuum gauge assembly

Abstract

The present disclosure relates to a thermal conductivity vacuum gauge assembly. The assembly comprises a body defining an internal chamber for receiving working gas and a heater element disposed within the chamber. The body is defined by a wall having an outer facing wall surface and an opposing inner facing wall surface. A thermal compensation element and a thermal equalisation element are in thermal communication with the body. The body is made of a material with a first thermal conductivity, and the thermal equalisation element is made of a material with a second thermal conductivity that is higher than the first thermal conductivity. The present disclosure also relates to a thermal conductivity vacuum gauge including the assembly.

Dependencies are inferred from the claim text.