Thermopile sensor and sensor array
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsKouhei Takahashi, Masaki Fujikane, Hiroyuki Tanaka
Life of this patent
Estimating the term…
Loading patent…
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsKouhei Takahashi, Masaki Fujikane, Hiroyuki Tanaka
Estimating the term…
A thermopile sensor according to the present disclosure includes a p-type portion and an n-type portion. The p-type portion has a first phononic crystal in which first holes are arranged in a plan view. The n-type portion has a second phononic crystal in which second holes are arranged in a plan view. The p-type portion and the n-type portion constitute a thermocouple. The boundary scattering frequency of phonons in the first phononic crystal is different from the boundary scattering frequency of phonons in the second phononic crystal. Alternatively, the ratio of the sum of the areas of the first holes to the area of the first phononic crystal in a plan view is different from the ratio of the sum of the areas of the second holes to the area of the second phononic crystal in a plan view.
A thermopile sensor comprising:
Dependencies are inferred from the claim text.