Vacuum pump
AssigneeEdwards Japan Limited
InventorsTakaaki Ono, Katsuhisa Yokozuka
Life of this patent
Estimating the term…
Abstract
A vacuum pump, which prevents adhesion of products even when a rotating body is stopped, by heating the rotating body using an alternating current (AC) magnetic field. Two heating electromagnets are disposed facing each other across a rotating body. The heating electromagnets receive a supply of AC electric current from a heating electric power source. Excitation of the heating from this AC electric current generates an AC magnetic field. The generated AC magnetic field intersects with the rotating body. Eddy current is generated around the intersecting AC magnetic field. The rotating body is heated by this eddy current. This heating enables deposition of products to be prevented even further, and realize improved pump operation efficiency.
Claims12
A vacuum pump, comprising:
- a rotating body;
- a motor that rotationally drives the rotating body;
- a motor electric power source that supplies electric power to the motor for rotational driving;
- a heating electromagnet that generates an alternating current (AC) magnetic field of a predetermined magnetic field frequency, to heat the rotating body;
- and
- a heating electric power source that supplies electric power by AC electric current to the heating electromagnet;
- a magnetic bearing that supports the rotating body in air by levitation;
- a magnetic bearing electric power source that supplies electric power to the magnetic bearing;
- a magnetic bearing inverter that converts output voltage of the magnetic bearing electric power source, and that applies voltage to the magnetic bearing;
- and
- a magnetic bearing inverter controller that controls the magnetic bearing inverter, wherein:
- the AC magnetic field generated at the heating electromagnet is made to intersect with the rotating body, thereby generating an eddy current at the rotating body, at a perimeter of the AC magnetic field that intersects the rotating body, and
- the magnetic field frequency is greater than half of a control frequency of the magnetic bearing inverter controller.
A vacuum pump, comprising:
- a rotating body:
- a motor that rotationally drives the rotating body;
- a motor electric power source that supplies electric power to the motor for rotational driving;
- a heating electromagnet that generates an alternating current (AC) magnetic field of a predetermined magnetic field frequency, to heat the rotating body;
- and
- a heating electric power source that supplies electric power by AC electric current to the heating electromagnet;
- a magnetic bearing that supports the rotating body in air by levitation;
- a magnetic bearing electric power source that supplies electric power to the magnetic bearing;
- a displacement sensor that measures a position of the rotating body by non-contact on the basis of a position signal modulated by a predetermined sensor frequency;
- and
- a demodulation circuit that includes a low-pass filter for demodulating the position signal, wherein:
- the AC magnetic field generated at the heating electromagnet is made to intersect with the rotating body, thereby generating an eddy current at the rotating body, at a perimeter of the AC magnetic field that intersects the rotating body, and
- the magnetic field frequency is greater than a cutoff frequency of the low-pass filter.
A vacuum pump, comprising:
- a rotating body:
- a motor that rotationally drives the rotating body;
- a motor electric power source that supplies electric power to the motor for rotational driving;
- a heating electromagnet that generates an alternating current (AC) magnetic field of a predetermined magnetic field frequency, to heat the rotating body;
- and
- a heating electric power source that supplies electric power by AC electric current to the heating electromagnet;
- a magnetic bearing that supports the rotating body in air by levitation;
- a magnetic bearing electric power source that supplies electric power to the magnetic bearing;
- and
- a displacement sensor that measures a position of the rotating body by non-contact on the basis of a position signal modulated by a predetermined sensor frequency, wherein:
- the AC magnetic field generated at the heating electromagnet is made to intersect with the rotating body, thereby generating an eddy current at the rotating body, at a perimeter of the AC magnetic field that intersects the rotating body, and
- the magnetic field frequency is greater than the sensor frequency.
Dependencies are inferred from the claim text.