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US 12,486,593 B2Granted
Axial positioning of magnetic poles while producing a silicon ingot
AssigneeGlobalWafers Co., Ltd.
InventorsJaeWoo Ryu, Carissima Marie Hudson, JunHwan Ji, WooJin Yoon
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Abstract
Methods for producing a silicon ingot in which a horizontal magnetic field is generated are disclosed. The magnet position is controlled in at least two stages of ingot growth. The magnetic poles may be at a first position during the first stage of ingot growth and lowered to a second position in a second stage of ingot growth. By controlling the magnet position, the crystal-melt interface shape may be relatively more consistent.
Claims17
A method for producing a silicon ingot, the method comprising:
- melting polycrystalline silicon in a crucible enclosed in a growth chamber of an ingot puller apparatus to form a melt, the melt having a melt free surface;
- generating a horizontal magnetic field within the growth chamber;
- contacting a seed crystal with the melt;
- withdrawing the seed crystal from the melt to form the silicon ingot;
- raising the crucible to maintain the melt free surface at the same position relative to the ingot puller apparatus;
- and
- regulating a position of a maximum gauss plane during formation of a constant diameter portion of the silicon ingot in at least two stages of ingot growth, the at least two stages comprising:
- a first stage corresponding to formation of the silicon ingot from a beginning of formation of the constant diameter portion of the silicon ingot up to an intermediate ingot length;
- and
- a second stage corresponding to formation of the silicon ingot from at least the intermediate ingot length to a total length of the constant diameter portion, the crucible being raised during the first and second stages of ingot growth;
- and
- wherein regulating the position of the maximum gauss plane comprises maintaining the position of the maximum gauss plane in the second stage at a position lower than the position of the maximum gauss plane during the first stage, the position of the maximum gauss plane being maintained at a position at least 100 mm below the melt free surface during the second stage.
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Dependencies are inferred from the claim text.