Heater in hot-zone of single crystal pulling apparatus and single crystal pulling apparatus
AssigneesXi'an Eswin Material Technology Co., Ltd., Xi'an Eswin Silicon Wafer Technology Co., Ltd.
InventorsWenwu Yang, Bokcheol Sim
Life of this patent
Estimating the term…
Abstract
The present disclosure discloses a heater in a Hot-Zone of a single crystal pulling apparatus and a single crystal pulling apparatus. The heater in the Hot-Zone of the single crystal pulling apparatus includes a side-main heater and an auxiliary heater. Each of the side-main heater and the auxiliary heater is a cylindrical structure with openings at two ends thereof. Each of the side-main heater and the auxiliary heater includes a top open end and a bottom open end. The auxiliary heater is sleeved around the side-main heater, and the top open end of the auxiliary heater extends out of the top open end of the side-main heater.
Claims16
A heater in a Hot-Zone of a single crystal pulling apparatus, comprising:
- a side-main heater;
- and
- an auxiliary heater;
- wherein each of the side-main heater and the auxiliary heater comprises a cylindrical structure with openings at two ends thereof, each of the side-main heater and the auxiliary heater includes a top open end and a bottom open end, the auxiliary heater is sleeved around the side-main heater, and the top open end of the auxiliary heater extends out of the top open end of the side-main heater;
- the side-main heater includes a heater body located between the top open end of the side-main heater and the bottom open end of the side-main heater;
- wherein the auxiliary heater includes:
- a protective casing surrounding the side-main heater;
- and
- an electromagnetic induction coil accommodated in the protective casing;
- wherein the protective casing includes an inner casing and an outer casing that are fastened to each other;
- and
- wherein,
- each of the inner casing and the outer casing is cylindrical;
- the inner casing covers and surrounds an entire outer peripheral side of the heater body of the side-main heater;
- the outer casing is sleeved around the inner casing with a chamber defined between the outer casing and the inner casing;
- the inner casing includes a first inner side wall that cooperates with the outer casing to define the chamber;
- the electromagnetic induction coil is accommodated in the chamber;
- the electromagnetic induction coil is spirally wound around the first inner side wall from a top open end of the inner casing to a bottom open end of the inner casing;
- and
- two ends of the electromagnetic induction coil extend out of the protective casing, respectively.
A single crystal pulling apparatus, comprising:
- a heater in a Hot-Zone of the single crystal pulling apparatus, the heater in the Hot-Zone of the single crystal pulling apparatus including a side-main heater and an auxiliary heater, each of the side-main heater and the auxiliary heater being a cylindrical structure with openings at two ends thereof, each of the side-main heater and the auxiliary heater including a top open end and a bottom open end, wherein the auxiliary heater is sleeved around the side-main heater, and the top open end of the auxiliary heater extends out of the top open end of the side-main heater;
- the side-main heater includes a heater body located between the top open end of the side-main heater and the bottom open end of the side-main heater;
- wherein the auxiliary heater includes:
- a protective casing surrounding the side-main heater;
- and
- an electromagnetic induction coil accommodated in the protective casing;
- wherein the protective casing includes an inner casing and an outer casing that are fastened to each other;
- and
- wherein,
- each of the inner casing and the outer casing is cylindrical;
- the inner casing covers and surrounds an entire outer peripheral side of the heater body of the side-main heater;
- the outer casing is sleeved around the inner casing with a chamber defined between the outer casing and the inner casing;
- the inner casing includes a first inner side wall that cooperates with the outer casing to define the chamber;
- the electromagnetic induction coil is accommodated in the chamber;
- the electromagnetic induction coil is spirally wound around the first inner side wall from a top open end of the inner casing to a bottom open end of the inner casing;
- and
- two ends of the electromagnetic induction coil extend out of the protective casing, respectively.
Dependencies are inferred from the claim text.