Method of bubble removal from viscous fluid
AssigneesTaiwan Semiconductor Manufacturing Company, Ltd., Tsmc Nanjing Company, Limited
InventorsChian-Niang Lin, Barry Tsao, Tsung Tso Tsai
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Abstract
A method includes receiving, in a first vessel, a flow of fluid from a second vessel, wherein the flow of fluid is generated by pressurizing a head space over the fluid in the second vessel; capturing the flow of fluid from the second vessel at an upper end of a de-bubbling slide in the first vessel; and directing the flow of fluid along a flow surface of de-bubbling slide to a lower portion of the first vessel, such that bubbles and dissolved gases in the fluid exit the fluid on the flow surface of the de-bubbling slide.
Claims20
A method, comprising:
- receiving, in a first vessel, a flow of fluid from a second vessel, wherein the flow of fluid is generated by pressurizing a head space over the fluid in the second vessel;
- capturing the flow of fluid from the second vessel at an upper end of a de-bubbling slide in the first vessel, wherein the upper end of the de-bubbling slide is exposed to atmospheric pressure;
- directing the flow of fluid along a flow surface of the de-bubbling slide to a lower portion of the first vessel, such that bubbles and dissolved gases in the fluid exit the fluid on the flow surface of the de-bubbling slide;
- and
- dispensing a volume of the fluid from the lower portion of the first vessel.
A method comprising:
- receiving a fluid containing bubbles at a receiving portion of a de-bubbling slide, wherein receiving the fluid contacting bubbles comprises receiving the fluid containing bubbles at a first location in the receiving portion, and the de-bubbling slide is in a first vessel;
- passing the fluid containing bubbles from the receiving portion to a slide portion of the de-bubbling slide, wherein passing the fluid containing bubbles comprises passing the fluid containing bubbles at a second location in the receiving portion, and a diameter, defined by outer walls of the receiving portion, of the second location is less than a diameter, defined by the outer walls of the receiving portion, of the first location;
- flowing the fluid containing bubbles along the slide portion to facilitate removal of the bubbles and produce a reduced-bubble fluid;
- and
- dispensing the reduced-bubble fluid from the first vessel, wherein dispensing the reduced-bubble fluid comprises dispensing the reduced-bubble fluid onto a wafer.
A method, comprising:
- receiving, in a first vessel, a flow of fluid from a second vessel, wherein the flow of fluid is generated by pressurizing a head space over the fluid in the second vessel, and the fluid contains bubbles;
- capturing the flow of fluid from the second vessel at receiving portion of a de-bubbling slide in the first vessel, wherein the receiving portion has a first diameter;
- directing the flow of fluid along from the receiving portion to a slide portion of the de-bubbling slide, wherein the slide portion has a second diameter less than the first diameter;
- flowing the fluid along the slide portion to facilitate removal of the bubbles from the fluid, wherein flowing the fluid along the slide portion comprises flowing the fluid through a tube, wherein an uppermost surface of the tube comprises a plurality of holes, and an entirety of a lowermost surface of the tube is free of holes;
- and
- dispensing the fluid from the first vessel.
Dependencies are inferred from the claim text.